Micromachined pressure sensor based on sapphire for high temperature applications

Micromachined pressure sensor based on sapphire for high temperature applications

Procedia Engineering 5 (2010) 1396–1400 www.elsevier.com/locate/procedia c 2010 Published by Elsevier Ltd. c 2010 Published by Elsevier Ltd. 1877-7...

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Procedia Engineering 5 (2010) 1396–1400 www.elsevier.com/locate/procedia

c 2010 Published by Elsevier Ltd.

c 2010 Published by Elsevier Ltd. 1877-7058 doi:10.1016/j.proeng.2010.09.376

S. Fricke et al. / Procedia Engineering 5 (2010) 1396–1400

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S. Fricke et al. / Procedia Engineering 5 (2010) 1396–1400

S. Fricke et al. / Procedia Engineering 5 (2010) 1396–1400

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S. Fricke et al. / Procedia Engineering 5 (2010) 1396–1400